3D Calibration

m2c 3D calibration technology helps to turn a SEM with 4 Quadrant BSE detectors (4Q BSD) into a quantitative measurement system. 3D calibration with special m2c reference structures for 4Q BSD SEMs has the following advantages:

• Simultaneous (one-step) lateral and vertical calibration
• Calibration is extremely efficient and accurate due to advanced image processing methods
• Calibration structure has a spherical segment for the signal adjustment of the four backscatter detectors (BSD)

m2c 3D calibration structures for 4Q BSD SEM systems are available for several scan areas, from 40 μm x 40 μm and up to 80 μm x 80 μm. The complete structure with four elements (full area) or a single pyramidal element (quarter area) may be used for the automated calibration process

m2c 3D SPM calibration technology provides improved measurement accuracy and has the following advantages:

• One Step: Simultaneous lateral and vertical calibration is provided in one measurement step
• One Model: For the first time, determination of coupling between vertical and lateral axes is possible
• One Click: Calibration is extremely efficient and accurate due to advanced image processing methods
• One Reference: Universal application with one reference structure is possible (SPM, CLSM, SEM or other)

m2c 3D SPM calibration structures are available for several scan areas, from 20 μm x 20 μm and up to 80 μm x 80 μm. The complete structure with four pyramidal elements (full area) or a single pyramidal element (quarter area) may be used for the automated calibration process.