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Which Size of Target fits my Sputter Coater?

The size of the sputter target is given by the type of sputter coater used. Foil targets are sputter targets without a backing plate of different material. The coater model / design defines if targets with or without backing plate can be used.

 

The thickness of a target defines the amount of material that can be sputtered during the target life cycle. If a target gets very thin in some areas or even gets holes it has reached its end of live and needs to be exchanged.

 

Sputter-Target
Diameter
Sputter-Coater
Manufacturers & Models
19mm GATAN
681 Ion Beam Coater 682 PECS Ion Beam Coater 685 PECS II Ion Beam Coater
               
24mm BIO-RAD
E7400 / LT7400
QUORUM PP2000 / PP2000T
PP3000T / PP3010T
VG Microtech / Fisons / Thermo PP2200 / PP2000T            
50mm ANATECH/ TECHNICS
Hummer I / II / III / Jr
FULLAM
EffaCoater / EMS-76
SEC
MCM-100 / MCM-200
SPI
SPI Super
         
54mm Bal-Tec
SCD 005 / 040 / 050 / 500
MED 10 / MED 20
HHV
BT150 / BT300
LEICA
EM SCD 005 / 050 / 500
EM MED 020
ACE 200 / ACE 600
SAFEMATIC
CCU-010
         
57mm AGAR
Manual / Automatic
High resolution sputter coater
BIO-RAD
SC5200 / SC502
CRESSINGTON
108manual / 108auto
108auto/SE 208HR
EMITEC
SC7620 / SC7610
K575X &XD / K675X & XD
EMS
Q150 150R / 150T / 300R / 300R
K575X &XD / K675X & XD
SC7620 / SC7610
EMSCOPE SC502 HOYEON HC21 ISI
ISI 5400
JEOL
JFC-1200 / 1300 / 1400 / 1600
JFC-2300HR
58mm EMSCOPE
SC500 / SC500A (auf Ø58mm Target-Halter)
               
60mm DENTON
Desk II / II / IV / V
EDWARDS
150B / Scancoat
EMITECH
K500X / K550X / K650X
(Ø60mm Backing Plate)
EMS
K500X / K550X / K650X
(Ø60mm Backing Plate)
         
62mm HITACHI
MC 1000