Which Size of Target fits my Sputter Coater?
The size of the sputter target is given by the type of sputter coater used. Foil targets are sputter targets without a backing plate of different material. The coater model / design defines if targets with or without backing plate can be used.
The thickness of a target defines the amount of material that can be sputtered during the target life cycle. If a target gets very thin in some areas or even gets holes it has reached its end of live and needs to be exchanged.
Sputter-Target Diameter |
Sputter-Coater Manufacturers & Models |
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19mm | GATAN 681 Ion Beam Coater 682 PECS Ion Beam Coater 685 PECS II Ion Beam Coater |
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24mm | BIO-RAD E7400 / LT7400 |
QUORUM PP2000 / PP2000T PP3000T / PP3010T |
VG Microtech / Fisons / Thermo PP2200 / PP2000T | ||||||
50mm | ANATECH/ TECHNICS Hummer I / II / III / Jr |
FULLAM EffaCoater / EMS-76 |
SEC MCM-100 / MCM-200 |
SPI SPI Super |
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54mm | Bal-Tec SCD 005 / 040 / 050 / 500 MED 10 / MED 20 |
HHV BT150 / BT300 |
LEICA EM SCD 005 / 050 / 500 EM MED 020 ACE 200 / ACE 600 |
SAFEMATIC CCU-010 |
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57mm | AGAR Manual / Automatic High resolution sputter coater |
BIO-RAD SC5200 / SC502 |
CRESSINGTON 108manual / 108auto 108auto/SE 208HR |
EMITEC SC7620 / SC7610 K575X &XD / K675X & XD |
EMS Q150 150R / 150T / 300R / 300R K575X &XD / K675X & XD SC7620 / SC7610 |
EMSCOPE SC502 | HOYEON HC21 | ISI ISI 5400 |
JEOL JFC-1200 / 1300 / 1400 / 1600 JFC-2300HR |
58mm | EMSCOPE SC500 / SC500A (auf Ø58mm Target-Halter) |
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60mm | DENTON Desk II / II / IV / V |
EDWARDS 150B / Scancoat |
EMITECH K500X / K550X / K650X (Ø60mm Backing Plate) |
EMS K500X / K550X / K650X (Ø60mm Backing Plate) |
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62mm | HITACHI MC 1000 |