microCal - 3D Calibration and data correction software

microCal

m2c calibration software microCal is recommended for a successful 3D calibration. It is developed especially for an automated and easy 3D calibration with m2c calibration structures. By using a marker based calibration technology, it provides improved measurement accuracy and has the following advantages:

One Step: Simultaneous processing of lateral and vertical calibration parameters (scale, shear)
One Model: For the first time, determination of coupling between vertical and lateral axes is possible
One Click: Due to advanced image processing and statistical methods, calibration is extremely efficient and accurate
One Reference: Software and calibration structures are suitable for different measurement devices

Product Details

Description

m2c microCal allows an easy and automated calibration of your microscope. 3D measurement data of m2c calibration structures are automatically analysed and compared to the provided reference data. microCal calculates 6 linear calibration parameters: three scale factors for the co-ordinate axes, and three coupling factors for coupling between all co-ordinate axes (orthogonal deviation). In addition, it provides tools for 3D data manipulation, especially for 3D data correction based on the calibration results. m2c microCal includes the following features:

Automated calibration due to advanced image processing algorithms, including detection of sample orientation and sub-pixel co-ordinate measurement
Reliable processing of calibration parameters due to advanced statistical methods (including leastsquares methods and outlier detection)
Mathematical and graphical accuracy analysis
Results and settings are saved into a project file
Integrated export functions for PDF protocol files or for ASCII data (for further use)
Calibration parameters are saved for data correction of all further measurements performed by the customer’s microscope
Software installation includes 3D data manipulation and correction software microCorrect
Different SPM file formats and import filters for ASCII and image data files are included

microCal

Graphical analyses of calibration results: Scaled error
vectors of the marker coordinates show the accuracy
of the calibration. Redvector: Outlier detection.

microCal - Results window: Scale and shear are calculated in all three spatial axes. The overall error gives an overview of the achieved accuracy.

Results window: Scale and shear are calculated in all three spatial axes.
The overall error gives an overview of the achieved accuracy.

This software is compliant with VDI/VDE Guideline 2656 “Determination of geometrical quantities by using of Scanning Probe Microscopes – Calibration of measurement systems”.

System requirements: PC with MS Windows XP / Windows 7. This software makes intensive use of image processing algorithms. To avoid long processing times, we recommend using a Personal Computer with a powerful CPU.