3D calibration structures for SPM

Please note: This table contains only nominal values. The real dimensions differ from these nominal values. As a special feature, m2c calibration structures have reference marks with calibrated co-ordinates. For calibration, the reference marks have to be used. To provide a traceable calibration, reference measurements are performed by the German metrological institute PTB upon request.

Each calibration structure can be used for the calibration of at least two scan areas (whole structure and single pyramid). For different tasks, m2c also provides other calibration structures and customized layouts upon request.

MMC-80, structure layout                                MMC-80, SEM image

MMC calibration structures are fabricated in a combination of FIB (Focused Ion Beam) deposition and FIB milling. They consist of a composite of carbon and platinum, placed on a 6 mm x 6 mm Silicon chip. This silicon chip is conductive and fixed on a 12 mm x 12 mm aluminium plate. For easier handling, a finder grid points to the calibration area.

How does it work?

m2c customers obtain a 3D calibration structure, the m2c 3D calibration software microCal, and a reference data set that represents the 3D coordinates of the reference marks on the structure surface.

The calibration structure is then measured with the customer’s SEM. A 3D data set is calculated with the customer’s 3D software. These data are imported into the m2c software package, automatically analysed and compared to the reference data.

The resulting geometric parameters, especially the scale in all three coordinate axes allow the characterisation of the accuracy of the used system as well as the correction of further measurements.

m2c calibration technology for Scanning Probe Microscopy is compliant with VDI/VDE Guideline 2656 “Determination of geometrical quantities by using of Scanning Probe Microscopes – Calibration of measurement systems” m2c also provides general services in measurement technology as well as in specific software development in the field of spatial data analysis, image processing and co-ordinate measurements. We are experts in FIB prototyping and in programming automated FIB patterning processes. Besides SPM calibration samples, m2c also offer other structure variants (i.e. with spheres for SEM calibration) and customized layouts upon request.

m2c calibration software microCal is recommended for a successful 3D calibration. It is developed especially for use with m2c 3D calibration structures. microCal allows an easy and automated calibration of your microscope. It determines 6 linear calibration parameters: three scale factors for the co-ordinate axes and three coupling factors for the coupling between all co-ordinate axes (orthogonal deviation). In addition, it provides tools for 3D data manipulation, especially for 3D data correction based on the calibration results.